Event
Seminar: "Ultra-high Resolution in the Scanning Electron Microscope"
Friday, April 13, 2007
3:00 p.m.
IREAP Conference Room (ERF 1207)
Kris Rosfjord
rosfjord@umd.edu
Seminar Announcement:
"Ultra-high Resolution in the Scanning Electron Microscope"
Bill Vanderlinde, Lab for Physical Sciences
Abstract:
Rapidly decreasing feature sizes in micro- and nano-electronic devices demand ever higher resolution microscopy tools. The scanning electron microscope (SEM) remains one of the most flexible tools for high resolution imaging. Modern field emission scanning electron microscopes have a nominal spot size as small as 1 nm, but 1 nm resolution is seldom achieved on ordinary samples due to limitations with beam-sample interactions. The limitations on resolution in the SEM will be discussed, and two methods will be presented which overcome these limitations and enable ultra-high resolution: STEM-in-SEM and low-loss imaging.
Biography:
Dr. William Vanderlinde is the Team Leader for Nanotechnology at the Laboratory for Physical Sciences in College Park, Maryland. He received a BS in Physics from the University of Virginia and a PhD in Materials Engineering from Cornell University. He has authored 30 papers including the Best Paper at ISTFA 2003, co-edited the Microelectronics Failure Analysis Desk Reference 5th Edition, and has been awarded two patents. He has taught courses in advanced microscopy at UMBC and at the ISTFA Tutorial Program.
